Combustion reaction in the Cu-Mo-Si system were investigated. A sample was ignited using electric arc and after completion of the combustion reaction, XRD, SEM, and EDS analysis were carried out. The microstructure consisted of almost spherical grains of MoSi 2 . Also a little amount of Mo-rich silicides (Mo 5 Si 3 , M0 3 Si) and copper silicides were present at the grain boundaries. For investigating the formation mechanism of this microstucture, another sample was ignited and when the combustion wave was almost in the middle of the sample, the compact was quenched into liquid nitrogen. The results indicated that at the leading edge of combustion front, liquid solution of Cu-Si forms. The Mo particles dissolve in this melt and after that MoSi 2 precipitates. By growing MoSi 2 particles, remaining melt becomes richer in Cu which finally solidifies in cooling. Also temperature profile investigation showed that the copper addition decreased the time needed for the formation of the product, reduced the combustion temperature and also lowered the activation energy of the combustion reaction.