In the world we live in, the use of micro-/nano- scale products is seen globally and in most cases further miniaturization of these devices is inevitable. These products are present in almost every aspect of our life including electronical devices, computers and laptops, vehicles and automobiles, aerospace devices, medical devices and many more fields. Thereby having full knowledge of this sophisticated technology is essential for the industry and academies of any advanced country. In Iran, a vast technological gap can be sensed towards this technology and there is great potential for building micro-/nano- research centers and fabrication facilities. The first step towards this new industrial revolution, the nano revolution, is gaining the knowledge of manufacturing and fabrication of miniaturized devices. The main objective of this project is to study and review the principles and fundamentals of micro-nano manufacturing techniques in an academic and industrial research and to present them in a comprehensive overview; and also to outline the devices and instruments needed for micro-/nano- manufacturing. The industry of micro-/nano- fabrication is one of the main branches of nanotechnology. This industry is a wide field of research and a very broad technology; but the top-down approaches of micro-/nano- fabrication can be classified to three main techniques: Nanolithography, laser micromachining and tool-based micromachining. Nanolithography is the technology to selectively patten substrates of almost any material using chemical or plasma etching. Laser micromachining uses laser beam to pattern substrates and mostly ultrashort pulse lasers and excimer lasers are used for micromachining. Tool based micromachining uses high-speed, high precision CNC machines and micro-tools to create 3D structures in most metallic materials. The production and manufacturing of many miniaturized devices is highly dependant on having the knowledge of this new technology. The first and most essential step to independence in micro-nano manufacturing is the cnstruction of experimental laboratories for practical experiments and industrial production. In this project, other than presenting the essential techniques for micro-nano fabrication, a high-tech research center capable of producing a wide range and variety of micro-nano products has been designed and its establishment has been proposed. The construction of this research center can have severe effects on the improvement of nanotechnology in Iran and raise the capability of research and production in this field. Key Words Micro-/nano- devices, Nanotechnology, Nanolithography, Laser, Tool-based micromachining, Etching