In electrical systems, electric motors are the most common actuators In some applications that extra precision e.g., micrometer and nanometer, is required, conventional motors can’t be used; because of their structural disability. In applications that need extra precision such as precision positioning systems (molecule scale microscopies, for example) new actuators are used. These actuators based on smart materials such as magnetostrictives, piezoelectrics, and shape memory alloys (SMAs). Piezoelectric actuators have been used widely in precision positioning applications, due to their advantages including fast response time, large mechanical force and simple setup. However, existence of nonlinearities such as hysteresis and creep and also vibrational dynamics make control of piezoelectric actuators challenging. Therefore, modeling and analysis of nonlinearities and vibrational dynamics play an important role in performance of control systems in precision positioning applications. In this study, first, mathematical model of a piezoelectric actuator is derived and implemented in MATLAB. Then, the obtained model is validated in comparison with actual output of piezoelectric actuator. To achieve actuator model, hysteresis is modeled and placed in cascade with linear dynamics of piezoelectric actuator. For this purpose, suitable model and appropriate identification algorithm for hysteresis is selected and implemented. Next, control structures that have been used to control piezoelectric actuators are studied and kashida; TEXT-ALIGN: justify; TEXT-KASHIDA: 0%; MARGIN: 0cm 0cm 10pt; unicode-bidi: embed; DIRECTION: ltr" Precision positioning, piezoelectric actuator, hysteresis, creep, vibrational dynamics, nonlinear identification, adaptive control.