There are a lot of scale free systems in nature which some of them are fractalsFractals are most commonly observed systems that describe whith a scaling exponent but multifractals describe not only whith a scaling exponent in fact a scaling exponent is not enough for describe this systems. In this study, multi-fractal analysis wa performed on the atomic force microscopy (AFM) images of the diamond-like carbon (DLC) thin films surface deposited at different substrate temperatures: room temperature (RT), 100 and 200°C. It was found that the surface roughness of thin films increases with substrate temperature. The results show that the DLC films are multi-fractal in nature. Moreover, the strength of multi-fractility the non-uniformity of the height probabilities and complexity of the DLC films increase as the substrate temperature increases
