One of the powerful analytical techniques for characterizing and qualitative analyzing of the materials is laser time of flight mass spectrometry. In this technique, ions produced due to the interaction of laser radiation with the surface of sample, accelerate in an electrostaticfield to obtain enough kinetic energy. These ions enter to a field free region and separated based on their mass-to- charge ratio (m/z) and reach the detector at different times. In this work, the alloy samples were irradiated by the laser light with enough intensity to produce ions via thermal ionization process. The surface of samples of different alloys containing different elements with different percentages irradiated by laser radiation (1064 nm) and the mass spectra of the samples were recorded. Then the spectra were used to analyze the composition of the samples. The alloys used in this study are x52 steel, Aluinium bronz alloy, super alloy base nickel, tin bronze phosphorus,lead bronze phosphorus and Ti-6Al-4V alloy. The results are divided into two categories.Alloys that were analyzed by laser light focusing and alloys that were studied using thermal ionization technique without focussing laser light.The results show that the thermal ionization method with a laser time of flight mass spectrometry is a quick and reliable method for qualitative identification and the method of laser light focalization with time of flight mass spectrometry. In most cases, the quantitative identification of components is also possible.Tin bronze phosphorous alloys and x52 steel were quantitatively studied and compared with XRF and quantum analysis, using laser focalization.Pb bronze phosphorus alloys, aluminum bronze, Ti-6Al-4V and Nickel base super nickel alloys were identified qualitatively by thermal ionization method.