Ternary and quarternary TiSiN and TiSiCN coatings, due to some special properties, are suitable choices for coating forming dies by physical vapor deposition. In this work, TiSiCN and TiSiN coatings with TiN/CrN and TiAlN interlayers, which were deposited by the cathodic arc process on the tool steel substrate, were evaluated. Macroparticles on surface of the coatings were examined for chemical composition and distribution. Most macroparticles are from final stages of deposition. The presence of carbon has increased the number of macroparticles. The TiSiCN and TiSiN coating structure was characterized by X-ray diffraction. The results showed nanocomposite structures with Ti(C, N) and TiN crystals and amorphous boundaries are rich in silicon and carbon. (Ti, Al)N phase was also identified in the crystalline structure of TiAlN coating. The size of the crystallites of the coatings was measured in a range of 9 to 11 nm by the rietveld method. Residual stress of the coatings are 3.4, 9.5 and 7.7 GPa for TiSiCN, TiSiN and TiAlN coatings respectively. The adhesion of the coatings carried out by the Rockwell C method and illustrated the fact that the presence of carbon significantly increases the adhesion of the coating to the substrate. Hardness tests were carried out at loads of 1 and 2 N and the L-P model was used to remove the substrate effect on hardness values. The hardness of TiSiCN coating was more than the two other coatings. The tribological properties of coatings and substrate were evaluated by dry friction tests in loads of 4 and 6 N and against ZrO 2 ball and 52100 steel pin abrasives. Addition of carbon to nitride coatings has reduced the adhesion wear mechanism and friction coefficient to around 0.25. The wear rate of the substrate was 46.22 and the coatings were in the range of 8 to 10 mm 3 /Nm×10 -6 . The results of the tests on the coatings led to choose TiSiCN coating for field test. For deep drawing of steel tubes, TiSiCN coated and non-coated dies were compared, and reported that this coating has increased life time of dies more than ten times.
