In this work, the fabrication and characterization of diamond-like carbon (DLC) thin films on Si-(100) substrates using pulsed laser deposition (PLD) technique were investigated. In the first part of the work, DLC thin films were deposited at the substrate temperature ranging from room temperature (RT) to 300 °? and the effect of substrate temperature on structural, surface and mechanical properties of the samples were studied. It was found that the DLC films deposited at RT are purely amorphous in structure with high sp 3 bonding (above 70 pct) and exhibit very smooth surfaces with a surfaces roughness of 0.24 nm. Raman and XPS results clearly indicated a structural transition from amorphous to nanocrystalline graphitic nature, structural ordering of DLC films, and a decrease in the sp 3 content with increasing substrate temperature. It was found that the amount of sp 3 sites decrease from 42, to 30 and 24 pct with increasing substrate temperature from 100 to 200 and 300 °?, respectively. Meanwhile, the surface roughness of the obtained films increases from 0.24 to 1.9 nm with an increase in substrate temperature from room temperature to 300 °?. It was found that the mechanical properties such as hardness, elastic modulus, plastic index parameter, and elastic recovery decrease with increasing the substrate temperature. For example, a decrease in the hardness and elastic modulus from 32 and 308 GPa to 13 and 147 GPa is seen with increasing the deposition temperature from RT to 300 °?, respectively. The contact angle (CA) measurements indicated that the CA is 72? for sample processed at RT which increases to 74, 80 and 85? for samples processed at 100, 200 and 300 °?, respectively. Moreover, it is observed that CA and hydrophobicity of the obtained DLC films is sensitive not only to sp 2 /sp 3 ratio, but also to the ordering nature of sp 2 clusters. In the second part of the work, DLC thin films were deposited using a magnetically-assisted PLD technique (with different strengths of 220 and 350 mT at the substrate surface) and their structural, surface and mechanical properties were studied. It was observed that the diamond-like character, thickness and deposition rate of the DLC films increase in the presence of magnetic field. An increase in the thickness and sp 3 content of the obtained thin films from 165 nm and 30 pct to 335 nm and 65 pct was observed, respectively. The films deposited under application of magnetic field exhibit a denser microstructure and smoother surface with lower a surface of 0.18 nm. Nanoindentation measurements indicated that the mechanical properties improved in the presence of magnetic field. The hardness and elastic modulus increase from 13 and 152GPa to 30 and 300GPa with application of magnetic field and an increase in its strength, respectively. Also, it was observed that CA of the samples decrease from 79 to 74? under the above mentioned conditions.