According to increasing need for energy in the most countries, renewable energies are on the agenda, and the issue of energy supply is one of the most important issues renewable energies in the world that is being considered and exploited. Therefore, many experts believe the solution that they are currently facing. Currently, solar energy is one of the cleanest and of solar energy use is to site selection areas where the sites have the optimal to this problem is the construction of solar power plants. So, the first step in the development a multi-criteria evaluation method including fuzzy method, Boolean, linear-weight solar energy and conditions needed to build the solar power plants. The purpose of this study was to use combination, hierarchical analysis technique and TOPSIS technique to identify suitable review, 4 criteria and 11 sub-criteria that are effective in site selection process site selection for solar power plants in Aran and Bidgol, Ardestan, Khoor and Biabanak, Kashan. , Naein and Natanz in Isfahan province. To carry out this study, after literature were selected including climatic criteria (sunshine, dust days and relative humidity), areas). Then the data layers and data required were collected, prepared and normalized topographic criteria (slope and distance from fault), Socio-economic criteria (distance from residential centers, distance from communication routes, distance from power using Fuzzy and Boolean methods. According to determination the weight lines and land use) and ecological criteria (distance from forbidden and protected and the solar power plant map was obtained in five different dir="RTL" of criteria and sub-criteria, hierarchical process method has been used and a questionnaire to this purpose was prepared. Then, using Boolean, Fuzzy, Weighted Linear Combination and Topsis methods, the layers were integrated Keywords: solar energy, multi-criteria evaluation, site selection, solar power plants